Merit Pressure Sensors

Piezoresistive pressure sensors are one of the very-first products of MEMS technology.
Those products are widely used in biomedical applications, automotive industry and household appliances.

The sensing material in a piezoresistive pressure sensor is a diaphragm formed on a silicon substrate, which bends with applied pressure. A deformation occurs in the crystal lattice of the diaphragm because of that bending. This deformation causes a change in the band structure of the piezoresistors that are placed on the diaphragm, leading to a change in the resistivity of the material. This change can be an increase or a decrease according to the orientation of the resistors.

 

Die PSI Bar KPa Size
3000 Series low pressure (PDF) 5 - 100 0.34 - 7 34.5 - 689.5 3.3 x 2.5mm
AP301 Series medium pressure (PDF) 100 - 1,000 7 - 69 689.5 - 6,895 2.8 x 2.2mm
5000 Series high pressure (PDF) 1,000 - 10,000 138 - 689 13,790 - 68,948 1.9x 1.6mm
7000 Series broad pressure (PDF) 15 - 500 1 - 34.5 103 - 3,447 2.2 x 1.6mm
HM Series harsh media, absolute (PDF) 100 - 500 7 - 34.5 700 - 3,447 2.2 x 1.9mm

 


Uncompensated Packages PSI Bar KPa Size
SMD Series surface-mountable, .30" square (PDF) 5 - 500+ .34 - 34.5+ 34.5 - 3,447+ 7.6 x 7.6mm
MS Series surface-mountable, .25" square (PDF) 15 - 500+ 1 - 34.5+ 103 - 3,447+ 6.4 x 6.4mm
PMD Series Thru-Hole Mountable 5 - 50 .34 - 3.5 34.5 - 345 8.1 x 7.6mm
Blood Pressure Packages PSI mbar mmHg KPa Size
BP Series disposable medical, blood pressure, compensated (PDF) -.58 - 5.8 40 - 400 -30 - 300 4 - 40 10.5 x 8.1mm
Laser-Trimmed Compensated Packages PSI mbar KPa Size
AP Series -15 - 300 -1 - 20.7 -103 - 2,068 12.45 x 14.73mm



Conversion of pressure or stress units
Merit Medical Systems, Inc., Reprinted by Permission
Conversion of pressure or stress units
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